EVB90609L-N2 Melexis Inc, EVB90609L-N2 Datasheet - Page 8

• Manufacturer Part Number: EVB90609L-N2
• Description: EVALUATION BOARD FOR MLX90609-N2
• Manufacturer: Melexis Inc

Specifications of EVB90609L-N2

• Sensor Type: Gyroscope, 1 Axis
• Sensing Range: ±75°/sec
• Interface: Analog and Digital
• Sensitivity: 26.67 mV/°/sec, 12.8 LSB/°/sec
• Voltage - Supply: 4.75 V ~ 5.25 V
• Embedded: No
• Utilized Ic / Part: MLX90609
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

The MLX90609 is a Z-axis rate-sensing device, also called yaw-rate sensing. It produces an analog
positive going output voltage for clockwise (CW) rotation around the axis normal to the package
top, i.e., clockwise when looking down at the package lid as well as a digital SPI signal proportional
to the angular rate.
The sensor is a MEMS gyroscope sensitive to Coriolis forces. To create a Coriolis force a
movement must be induced. The gyro has an actuated oscillating mechanical structure (primary
mode). The Coriolis force creates a second oscillating movement when the gyroscope rotates
(secondary mode). As Coriolis force is usually extremely weak the primary mode is driven into
resonance to keep the mechanical noise level low for the signal bandwidth used and to have a
good sensitivity. A capacitance change in the secondary mode is detected and transformed into an
output voltage by the electronic interface circuitry.
The electronic interface must convert a change in the sensor capacitance ∆C into a change in
transducer output voltage V
V
The bias and sensitivity are adjustable over temperature in order to compensate for the TC of
sensor and readout. After adjusting the bias and sensitivity values and after setting operating mode
switches during the calibration process the transducer output voltage versus angular rate must stay
as shown in Figure 5-1 over the specified temperature range.
The above transfer equation can be used for the digital output as well.
390109060901
Rev 010
OUTAR
5. Detailed Description
5.1 The Working Principle
= Bias + Sensitivity × AngularRate
Figure 5-1. Angular rate (positive for clockwise rotation) to voltage output
OUTAR
according to the following transfer equation:
Page 8 of 22
Angular Rate Sensor (Standard version)
MLX90609
Data Sheet
November/08