MPVZ5004G Freescale Semiconductor, MPVZ5004G Datasheet - Page 3

• Manufacturer Part Number: MPVZ5004G
• Description: Integrated Silicon Pressure Sensor On-Chip Signal Conditioned
• Manufacturer: Freescale Semiconductor

Sensors
Freescale Semiconductor
integrating the shear-stress strain gauge, temperature
compensation, calibration and signal conditioning circuitry
onto a single monolithic chip.
in the basic chip carrier (Case 482). A gel die coat isolates the
die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
are based on use of dry air as pressure media. Media, other
than dry air, may have adverse effects on sensor
performance and long-term reliability. Internal reliability and
Lead Frame
The performance over temperature is achieved by
Figure 2
The MPVZ5004G series sensor operating characteristics
5.0
4.0
3.0
2.0
1.0
Figure 2. Cross-Sectional Diagram (Not to Scale)
0
Wire Bond
0
Figure 4. Output versus Pressure Differential
at ±6.25% V
TRANSFER FUNCTION:
V
V
TEMP = 10 to 60°C
out
S
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
= 5.0 Vdc
MAX
illustrates the Differential or Gauge configuration
Differential Sensing
= V
Fluorosilicone
Gel Die Coat
S
*[(0.2*P) + 0.2] ± 6.25% V
Element
Operating Characteristics)
1.0
FSS
(without auto zero, note 5 in
Differential Pressure (kPa)
MIN
2.0
P1
P2
FSS
Die
TYPICAL
3.0
Steel Cap
Stainless
Die Bond
Thermoplastic
Case
4.0
qualification test for dry air, and other media, are available
from the factory. Contact the factory for information regarding
media tolerance in your application.
interfacing the output of the MPVZ5004G to the A/D input of
the microprocessor or microcontroller. Proper decoupling of
the power supply is recommended.
relative to pressure input. Typical, minimum and maximum
output curves are shown for operation over a temperature
range of 10°C to 60°C using the decoupling circuit shown in
Figure 3
pressure range.
Figure 3. Recommended Power Supply Decoupling and
5.0
4.0
3.0
2.0
1.0
(For additional output filtering, please refer to Application
0
Figure 3
Figure 4
0
TRANSFER FUNCTION:
V
V
TEMP = 10 to 60°C
Figure 5. Output versus Pressure Differential
out
S
1.0 µF
= 5.0 Vdc
The output will saturate outside of the specified
= V
at ±2.5% V
MAX
S
shows the recommended decoupling circuit for
and
*[(0.2*P) + 0.2] ± 2.5% V
Operating Characteristics)
Figure 5
1.0
0.01 µF
FSS
Output Filtering.
Differential Pressure (kPa)
Note AN1646.)
(with auto zero, note 5 in
shows the sensor output signal
V
s
+5 V
MIN
2.0
FSS
GND
IPS
V
out
TYPICAL
3.0
MPVZ5004G
470 pF
OUTPUT
4.0
3