FDUH002DB SENSORTECHNICS [Sensortechnics GmbH], FDUH002DB Datasheet

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FDUH002DB

Manufacturer Part Number
FDUH002DB
Description
Mass flow sensors for gases
Manufacturer
SENSORTECHNICS [Sensortechnics GmbH]
Datasheet
FEATURES
MEDIA COMPATIBILITY
SPECIFICATIONS
Maximum ratings
Supply voltage
Power consumption
Temperature limits
Mechanical shock
Note:
1
2
E / 11720 / A
Output voltage is ratiometric to supply voltage
sccm denotes standard cubic centimeters per minute
· Ranges 0...±200 sccm
· Bidirectional sensing
· Actual mass flow sensing
· Low differential pressure sensing
· Sensortechnics PRO services
To be used with dry gases only
The FDU series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
Operating
Storage
or 0...±2 "H
2
2
O (0...±5 mbar)
100 g (5 drops, 6 axes)
1
typ. 10 ±0.01 V
-25 to 85°C
-40 to 90°C
8 to 15 V
50 mW
ELECTRICAL CONNECTION
Mass flow sensors for gases
1
2
www.sensortechnics.com
3
4
5
6
FDU Series
7
8
1/6

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FDUH002DB Summary of contents

Page 1

FEATURES · Ranges 0...±200 sccm or 0...±2 "H O (0...±5 mbar) 2 · Bidirectional sensing · Actual mass flow sensing · Low differential pressure sensing · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FDU ...

Page 2

FLOW SENSOR CHARACTERISTICS ( ±0. 25° ± 2 ...

Page 3

... FLOW SPECIFICATIONS ( ±0. 25° FDUM200DB OUTPUT VS. FLOW CURVES FDUM200DB FDUH002DB E / 11720 / A Mass flow sensors for gases FDUH002DB www.sensortechnics.com FDU Series 3/6 ...

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HEATER CONTROL CIRCUIT kOhm Note: Circuits required for operation per specifications. Circuits are not on board the sensor. A) Customer supplied 1 kOhm resistor (affects temperature compensation and span voltage). ...

Page 5

OUTLINE DRAWING 8x0.25 (8x0.01) 17.02 (0.67) 27.94 (1.10) 1.14 (0.05) 2x Ø 4.70 (2x Ø0.19) 10.41 (0.41) mass: approx. 5.6 g GAS CORRECTION FACTORS ...

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ORDERING INFORMATION - AVAILABLE LISTINGS Note: Preferred listings are highlighted in grey ± ...

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