TPS31 ETC2 [List of Unclassifed Manufacturers], TPS31 Datasheet - Page 3

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TPS31

Manufacturer Part Number
TPS31
Description
Silicon Pressure Sensors
Manufacturer
ETC2 [List of Unclassifed Manufacturers]
Datasheet

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Application Information
Package:
The package body is made of alumina (Al
ceramic, an extremely rigid and stable material that is
highly impervious to chemicals. This results in
extremely high stability.
The sensor package is not sealed. This is necessary
for operation of the sensor.
Stability:
The small difference in coefficient of thermal
expansion between sensor and package sets the
TPS31 series apart from other pressure sensors.
The micromachined pressure sensor has a pyrex
base and is mounted with a flexible, chemical
resistant material into the ceramic package. Flexible
die attach allows for some tolerance of small changes
and helps isolate the sensor die from other changes
due to temperature, sensor mounting and package
mounting.
Additional stability is gained from factory stabilization
of all sensors.
Pressure port:
The F (face seal) port option is a highly reliable
connection method that allows direct mounting to a
measurement point with methods such as an o-ring
or epoxy. An o-ring provides for a leak resistant seal
and very robust connection. Designs for o-ring seals
may be found in the “Parker O-Ring Handbook”.
The T (tube) port option is also a reliable connection
method if the user finds a tube connection more
effective for their design. Pressure ports with tubing
barbs are designed for 1/8” OD, flexible tubing.
NOTE: DO NOT apply clamping pressure on the
package cover. It is possible to damage the package
if excessive pressure is applied. Proper care should
be exercised when mounting.
2
O
3
)
Media:
The bottom pressure port is tolerant of harsh
environments and many different media.
Wetted parts:
F (face seal) port option wetted surfaces are
composed of alumina ceramic, silicone die attach,
pyrex glass and silicon.
T (tube) port option adds 305 stainless steel.
Pressure ranges:
Standard pressure ranges are 15, 30, 60 and 100 psi
in both gage and absolute types. Custom pressure
ranges are available for large orders.
Soldering and contamination:
The TPS31 series packaging is not sealed due to the
need to provide an atmospheric port in gage pressure
application. This means that the TPS31 series are not
suitable for application where flux residue is to be
cleaned from the finished circuit assembly. Foreign
materials and contamination should be prevented
from entering the sensor package cavity.
TPS31 Rev. B March 2007

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