SCP1000 PCB3 VTI Technologies, SCP1000 PCB3 Datasheet - Page 5

• Manufacturer Part Number: SCP1000 PCB3
• Description: SENSOR I2C 30-120KPA PCB
• Manufacturer: VTI Technologies
• Series: SCP1000r

Specifications of SCP1000 PCB3

• Pressure Type: Absolute
• Operating Pressure: 4.35 ~ 17.40 PSI, 30 ~ 120 kPa
• Output: Digital
• Voltage - Supply: 2.4 V ~ 3.3 V
• Termination Style: Surface Mount
• Operating Temperature: -20°C ~ 70°C
• Package / Case: PCB Mount
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant
• Other names: 551-1044

1
1.1 Introduction
1.2 Functional Description
1.2.1
1.2.2
VTI Technologies Oy
www.vti.fi
General Description
Interface IC
Sensing element
SCP1000 is pressure sensor that measures absolute pressure. The sensor consists of a silicon
bulk micro machined sensing element chip and a signal conditioning ASIC. The pressure sensor
element and the ASIC are mounted inside a plastic pre-moulded package and wire bonded to
appropriate contacts. The round shaped sensor component has 18 SMD solderable contacts.
SCP1000 block diagram is presented in Figure 1 below.
Figure 1. SCP1000 system level block diagram.
The SCP1000 performs almost complete data processing on-chip. The pressure and temperature
output data are calibrated and compensated internally. The only operations over the output data
required to obtain the pressure in [Pa] and the temperature in [°C] is single multiplication with
constants, see more details in section 2.2.3.
The sensing element is manufactured using the proprietary bulk 3D-MEMS process of VTI enabling
robust, stable, low noise and low power capacitive sensors.
Absolute pressure sensor element consists of a silicon wafer that is locally thinned to form a
pressure sensitive diaphragm. The diaphragm acts as a movable plate of the capacitive sensor.
The stationary plate is a thin film metal deposited on a second, glass coated silicon wafer. The
wafers are joined by anodic bonding so that a hermetically enclosed space is formed between
them. The diaphragm deflects due to the pressure difference between the exterior of the sensor
and the internal vacuum reference chamber.
The communication between the SCP1000 and its host micro-controller (µC) is based on a serial
interface, an interrupt line and specialized pins used to trigger special functions. The serial
interface allows registers' read and write operations and the interrupt line signals events, which
require host intervention. Two different serial interfaces are available: SPI and TWI (TWI is very
similar to I
register access protocol is independent on the selected interface.
Sensing
element
2
C bus). The appropriate communication interface is pre-programmed in the factory. The
measurement
Temperature
generator
Clock
Doc.Nr. 8260800.08
Subject to changes
ADC
Pressure calculation
Computation block
and linearization
Serial interface
compensation
Temperature
SPI or TWI
To MCU
EEPROM
control
block
ASIC
SCP1000 Series
Rev.0.08
5/37