E32-D61 Omron, E32-D61 Datasheet - Page 18

• Manufacturer Part Number: E32-D61
• Description: Photoelectric Sensor
• Manufacturer: Omron
• Type: High Temperaturer

Specifications of E32-D61

• Sensor Output: Analog
• Mounting Type: DIN Rail
• Switch Terminals: Connector
• Sensor Housing: Barrel
• Sensor Input: Fiber Optic
• Sensing Range Max: 120mm
• Sensing Mode: Diffuse
• Sensing Distance: 45.72 mm
• Cable Type: Fiber Optic Diffuse Top Beam
• Features: Set-Mode blinking light source aids alignment
• Sensing Method: Light
• Fiber Optic Sensor Type: High Temperature
• Rohs Compliant: Yes
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

Features/Applications
18
Application-corresponding Models
Wafer Mapping
• Wafers are reliable detected with an ultrafine beam.
• The optical axis is adjusted before delivery to allow
easy installation.
E32-A03-1
■ Overview of Model Variations
*The sensing distances apply for use in combination with the E3X-DA-S Amplifier Unit (general-purpose, standard mode).
Type
Opening angle: 1.5°
Opening angle: 3° ultraslim
E32-A03
Features
With mounting
flange
With mounting
flange
■ Features
■ Engineering Data
Shape, sensing distance (mm)*
Optical axis adjusted
before delivery so
that displacement is
typically within 0.1°.
180
160
140
120
100
80
60
40
20
0
−10
8-inch Wafer Mapping Characteristic (Typical Examples)
−9
2 wafers
For
−8
−7
−6
−5
Distance moved, X (mm)
also be detected
Wafer piles can
Direction of rotation
−4
−3
1 wafer
−2
340
For
890
−1
0
E32-A03
E32-A03-1
E32-A04
E32-A04-1
1
Vertical rotation
6.35 mm
2
Fiber
2-wafer pile
Model number
3
4
170 mm
(t = 0.75 mm)
Silicon wafer
X
Fiber