F3M-S1213 Omron, F3M-S1213 Datasheet

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F3M-S1213

Manufacturer Part Number
F3M-S1213
Description
Sensor Hardware & Accessories Comb Sensor 300mm, 13 TIER
Manufacturer
Omron
Datasheet
1.F3M-S826.pdf (7 pages)

Specifications of F3M-S1213

Output Type
*
Sensor Type
*
Lead Free Status / Rohs Status
Lead free / RoHS Compliant
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
H
H
H
H
Ordering Information
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6j and F3M-S8j)
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function that ensures easy
adjustments within a minimal time. The remote teaching function
allows quick, on-the-fly set up.
Applicable wafer size
6 inches (4.76-mm pitch)
6 inches (4.76 mm pitch)
8 inches (6.35-mm pitch)
8 inches (6.35 mm pitch)
12 inches (10-mm pitch)
12 inches (10 mm pitch)
Silicon Wafer Mapping Sensor
Economical, one sensor detects most
wafer types, including dummy wafers
Models match wafer sizes of 300 mm,
200 mm and 150 mm
Automatic and remote teaching
capability
Self-diagnostic functions reduce
downtime
Number of cassette slots
25
26
25
26
13
25
R
Function
Self-diagnosis
---
Self-diagnosis
---
Self-diagnosis
Self-diagnosis
2
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
Static Electricity Protection
OMRON’s optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor from static electricity that may be charged on
semiconductor wafers at the time of mapping.
the F3M-S826/-S626.
Remarks
---
---
---
---
CE marking
CE marking
Part number
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
F3M-S

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F3M-S1213 Summary of contents

Page 1

... F3M-S626 Self-diagnosis --- F3M-S825 --- --- F3M-S826 Self-diagnosis CE marking F3M-S1213 Self-diagnosis CE marking F3M-S1225 Answer-back Alarms for Setting Errors and Self-diagnostic Alarms for Operation Errors These alarms help reduce system downtime and shorten troubleshooting time. Note: The self-diagnostic output function is not incorporated by the F3M-S826/-S626. ...

Page 2

... V max.) Inflow current NPN open collector (This table continues on the next page.) 3 F3M-S F3M-S1213 F3M-S1225 12-inch semiconductor silicon wafers and 12-inch SIC wafers (with transparency of 30% max Load power supply voltage: 30 VDC max. Load current max. (Residual voltage max.) ...

Page 3

... F3M-S826) to warn the user about operational errors. Answer-back Function: Normal or error teaching output turns • ON. Self-diagnostic Function: Warning output turns ON for a • decrease in optical input. 4 F3M-S826 F3M-S1213 F3M-S1225 Approx. 200 g Approx. 300 g ABS, aluminum (alumite treated/clear finish) --- Instruction manual F3M-S ...

Page 4

... Note: 1. Pin 28 will have answer-back output only when remote teaching input is turned ON. Otherwise, for Sensors other than F3M-S626/F3M-S826, this output is for self- diagnostic output. For F3M-S626/F3M-S826, this out- put is OUT26. 2. For the F3M-S1213, terminals for pins are not used. 5 F3M-S Assignment ...

Page 5

... Power indicator Mounting Dimensions Two, M4 (6.30) J F3M-S626 14 (0.55) Optical axis 18.5 (0.71) 50 (1.97) (3.94) Teaching button RUN/TEACH mode selector Two F3M-S826 14 (0.55) Optical axis 18.5 (0.71) 50 Two, R5 (1.97) Two, (3.94) 4.2-dia. Thirty, (19/0.08 dia.) vinyl-insulated, flat mounting holes bending cable Width: 38.1 Pitch: 1 ...

Page 6

... F3M-S J F3M-S1213 Power indicator RUN/TEACH mode selector Teaching indicator Teaching button Warning indicator Two, M4, depth: 8 (mounting holes) 25 (0.98) Optical axis 18 (0.71) OMRON XG4A-3034 Connector Optical axis 50 (1.97) 140 (5.51) Optical axis Precautions J CORRECT USE Avoid Damage to the F3M-S Do not use the F3M voltage that exceeds the rated • ...

Page 7

... OMRON ELECTRONICS LLC One East Commerce Drive Schaumburg, IL 60173 1-800-55-OMRON Cat. No. CEDSAX4 11/01 OMRON ON- -LINE Global -- http://www.omron.com USA -- http://www.omron.com/oei Canada -- http://www.omron.com/oci Specifications subject to change without notice. F3M-S OMRON CANADA, INC. 885 Milner Avenue Scarborough, Ontario M1B 5V8 416-286-6465 Printed in U.S.A. ...

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