CMR3000-D0X VTI Hamlin, CMR3000-D0X Datasheet - Page 4

• Manufacturer Part Number: CMR3000-D0X
• Description: Cmr3000-d0x Block Diagram With Digital Spi And I 2 C Interface
• Manufacturer: VTI Hamlin

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1.2
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1.2.2
VTI Technologies Oy
Myllynkivenkuja 6
P.O. Box 27
FI-01621 Vantaa
www.vti.fi
General Description
Introduction
Functional Description
Sensing element
Interface IC
CMR3000-D0X is a three axis gyroscope family targeted for high volume products requiring small
size, low price and low power consumption. It consists of a 3D-MEMS sensing element and a
signal conditioning ASIC in a wafer level package.
Block diagram of CMR3000-D0X is shown in Figure 1 below.
Figure 1. CMR3000-D0X block diagram with digital SPI and I
This document, no. 82112900, describes the product specification (e.g. operation modes, user
accessible registers, electrical properties and application information) for the CMR3000-D0X family.
The specification for an individual sensor is available in the corresponding data sheet.
The sensing element is manufactured using proprietary bulk 3D-MEMS process, which enables
robust, stable and low noise & power capacitive sensors.
The sensing element consists of a primary resonator and three secondary resonators. Primary
resonator is driven by the ASIC and the Coriolis force will couple to the secondary resonators.
Detected signal will be converted into a phase difference and then into a voltage in the signal
conditioning ASIC.
CMR3000 includes an internal oscillator, reference and non-volatile memory that enable the
sensor's autonomous operation within a system.
The sensing element is interfaced via drive circuitry, charge-sensitive-amplifiers (CSA) and phase
detector used for XYZ-angular rate detection. Followed by calibration and filtering in analog
domain, the signal is A/D-converted and then digitally filtered. Sensor output is user selectable
digital SPI or I
Angular rate data can be read via the serial bus and in power down mode the device is in-active.
Measurement bandwidth can be selected by register command.
Sens Y
Sens P
Sens X
Sens Z
Drive
Bias
2
C interface.
High-
Drive
Filter
CSA
pass
Bias
PLL
&
&
Doc.Nr. 82112900.A.02
Detection
Phase
Oscillator
Calibration
Low-pass
Filter
&
Reference
ADC
2
Memory
Volatile
C interface
Non-
Low-pass
Low-pass
Low-pass
Filter
Filter
Filter
Control
INT
&
SPI
I2C
CMR3000-D0X Series
i/f
&
INT
CSB
SCK/SCL
MISO
MOSI/SDA
Rev. A.02
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