TS105-2 HL-Planartechnik GmbH, TS105-2 Datasheet
TS105-2
Manufacturer Part Number
TS105-2
Description
Thermosensors
Manufacturer
HL-Planartechnik GmbH
Datasheet
1.TS105-2.pdf
(2 pages)
THERMOPILES
Any object emits infrared radiation. The radiation power is increasing with growing surface temperatures.
Based on this relation, THERMOPILES measure the emitted power and determine the object’s temperature
precisely.
Function Principle
THERMOPILES are based on the Seebeck effect, which is used since a long time for conventional
thermocouples. The application of micromechanics and thin film technology allows the production of
miniaturized and cost effective sensor elements.
A multitude of thermojunctions deposited on a silicon substrate is connected in series to form a
THERMOPILE. The hot junctions are thermally insulated from the cold junctions on the substrate by etching a
self-supporting extremly thin membrane. An absorbing layer on the hot junctions transforms the incoming
radiation into heat. A voltage proportional to the radiation is generated by the thermoelectric effect. The
sensors are delivered in TO5-packages. Different housings and filter types can be selected to find an optimal
solution for each application. Chips without housing are available as well.
Technical Data
Parameter
Number of thermojunctions
Material
Active Area
Chip Size
Resistance of Thermopiles
TC of resistance
Sensitivity of sensor
TC of sensitivity
Specific detectivity
Noise equivalent power
Noise voltage
Time constant
Operation temperature
Storage temperature
Reference Resistor
Resistance
TC of resistance
Function: R(T) = 1000 + 6,17*T*
105_12_e_01
absorption area
Hauert 13 44 227 Dortmund Tel.: ++49 / (0)231 / 97400 Fax.: ++49 / (0)231 / 974020
(hot junctions)
Sensors in thin film technology
SiNx-membrane
are used for non-contact surface temperature measuring.
Symbol
for detailled information see data sheet of reference resistor
TCR
NEP
TCR
TCS
R
t
A
S
U
A
D*
63
R
n
T
T
Ni
Ni
C
C
N
A
cm*Hz
nV / Hz
ppm / K
silicon substrate
(cold junctions)
1/2
V / W
% / K
% / K
Unit
mm²
mm²
HL-Planartechnik GmbH
/ W
nW
ms
k
°C
°C
1/2
1000
-0.03
-0.52
typical 110
6178
BiSb, NiCr
-20 ... 100
-40 ... 100
2.1 * 10
0.7 * 0,7
2.0 * 2.0
50
40
Value
0.4%
0.35
0.02
0.08
100
1%
37
15
10
8
25°C, 500 K, DC
0 °C...100 °C
+25...+75 °C
+25...+75 °C
Condition
500 K, 1 Hz
500 K, 1 Hz
500 K, 1 Hz
500 K, DC
25 °C
0 °C
Filter
100
90
80
70
60
50
40
30
20
10
0
4
Thermosensors
5
TS105-1 / TS105-2
6
7
8
W avelength (um )
9 10 11 12 13 14
March 1999
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TS105-2 Summary of contents
Page 1
... 1 500 500 °C -20 ... 100 °C -40 ... 100 1000 0 °C 0.4% ppm / K 6178 0 °C...100 °C 1% HL-Planartechnik GmbH Thermosensors TS105-1 / TS105-2 Filter 100 avelength (um ) March 1999 ...
Page 2
... Hauert 13 44 227 Dortmund Tel.: ++49 / (0)231 / 97400 Fax.: ++49 / (0)231 / 974020 105_12_e_01 TS105-1 125 150 175 200 TS105-1 HL-Planartechnik GmbH Thermosensors TS105-1 / TS105-2 TS105-2 Conditions: Distance Thermopile/Black Body 5 cm, emissivity= 1, surrounding temperature 25°C Tables with emissivity of different materials and surfaces are available. 225 TS105-2 March 1999 ...