lis2l01 STMicroelectronics, lis2l01 Datasheet - Page 3

• Manufacturer Part Number: lis2l01
• Description: Inertial Sensor 2axis/1g Linear Accelerometer
• Manufacturer: STMicroelectronics

ELECTRICAL CHARACTERISTCS (Temperature range 0°C to 80° C, supply voltage Vdd = 5V ±5%.)
1
1.1 Sensor element
The ThELMA process is utilized to create a surface micro-machined accelerometer. The technology allows car-
ry out silicon structure on suspension, the structure are attached to the substrate in few points called anchor
and free to move on a plane parallel to the substrate itself. To be compatible with the traditional packaging tech-
niques a cap is placed on top the sensor element to avoid the molding goes between the elements making the
sensor useless.
The equivalent circuit for the sensor is shown in the below figure; when a linear acceleration is applied, the proof
mass displaces from its nominal position, causing an imbalance in the capacitive half-bridge. This imbalance is
measured using charge integration in response to a voltage pulse applied to the sense capacitor.
The nominal value of the capacitors, at steady state, is few pF and when an acceleration is applied the maximum
variation of the capacitive load is few tenth of pF.
Symbol
Cload
Rload
Vdd
Voff
Idd
fuc
Vst
So
an
Ar
Vt
FUNCTIONALITY
Supply voltage
Supply current
Zero-g level
Acceleration range
Sensitivity ratiometric to Vdd
Upper cutoff frequency low pass
filter
Equivalent noise acceleration
Self test output voltage
Ratiometric to Vdd
Self test input
Logic 1 voltage
Logic 0 voltage
Capacitive load drive
Resistive load output
Parameter
T = 25° C
Vdd = 5V
T = 25° C
-3dB/2
Bandwidth = 0.1…30Hz
T = 25° C
@ 5V
ratiometric to Vdd
nd
Test Condition
order filter
Vdd/2
– 0.1
Min.
4.75
TBD
3.75
Vss
1.8
27
Vdd/2
Typ.
TBD
10
30
50
5
2
1
1
Vdd/2
Max.
+ 0.1
5.25
TBD
1.25
Vdd
100
2.2
33
LIS2L01
k
Unit
mA
V/g
mg
Hz
pF
V
V
V
V
V
g
3/6