LIS2L02AQ_04 STMICROELECTRONICS [STMicroelectronics], LIS2L02AQ_04 Datasheet - Page 5

• Manufacturer Part Number: LIS2L02AQ_04
• Description: INERTIAL SENSOR-2Axis - 2g/6g LINEAR ACCELEROMETER
• Manufacturer: STMICROELECTRONICS [STMicroelectronics]

3
The LIS2L02AQ is a low-cost, low-power, analog output dual-axis linear accelerometer packaged in QFN pack-
age. The complete device includes a sensing element and an IC interface able to take the information from the
sensing element and to provide an analog signal to the external world.
3.1 Sensing element
The THELMA process is utilized to create a surface micro-machined accelerometer. The technology allows to
carry out suspended silicon structures which are attached to the substrate in a few points called anchors and
free to move on a plane parallel to the substrate itself. To be compatible with the traditional packaging tech-
niques a cap is placed on top of the sensing element to avoid blocking the moving parts during the molding
phase.
The equivalent circuit for the sensing element is shown in the figure below; when a linear acceleration is applied,
the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-bridge. This im-
balance is measured using charge integration in response to a voltage pulse applied to the sense capacitor.
Figure 5. Equivalent electrical circuit
FUNCTIONALITY
C
C
C
C
C
C
pr
pr
ps1
ps2
ps1
ps2
C
C
C
C
s1y
s2y
s1z
s2z
R
R
R
R
R
R
s1
r
s2
s1
r
s2
S2x
S2y
S1x
S1y
rot
LIS2L02AQ
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