mpxhz6400a Freescale Semiconductor, Inc, mpxhz6400a Datasheet

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mpxhz6400a

Manufacturer Part Number
mpxhz6400a
Description
Media Resistant And High Temperature Accuracy Integrated Silicon Pressure Sensor For Measuring Absolute Pressure, On-chip Signal Conditioned, Temperature Compensated And Calibrated
Manufacturer
Freescale Semiconductor, Inc
Datasheet

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mpxhz6400aC6T1
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mpxhz6400aC6T1
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Freescale Semiconductor
Technical Data
© Freescale Semiconductor, Inc., 2005. All rights reserved.
Media Resistant and
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
amp circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
pressure sensor chip.
Features
Typical Applications
Ported
Element
Device
Type
The Freescale MPXHZ6400A series sensor integrates on-chip, bipolar op
The MPXHZ6400A series piezoresistive transducer is a state-of-the-art,
Figure 1
Improved Accuracy at High Temperature
Available in Small and Super Small Outline Packages
1.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Temperature Compensated from –40° to +125°C
Durable Thermoplastic (PPS) Surface Mount Package
Industrial Controls
Engine Control/Liquified Petroleum Gas (LPG)
Absolute, Axial
Port
shows a block diagram of the internal circuitry integrated on a
Options
ORDERING INFORMATION
1317A MPXHZ6400AC6T1 Tape & Reel MPXHZ6400A
Case
No.
MPX Series
Order No.
Packing
Options
Marking
Device
1. Pins 1, 5, 6, 7, and 8 are internal device
SUPER SMALL OUTLINE PACKAGE
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
1
2
3
4
20 TO 400 kPA (3.0 TO 58 psi)
MPXHZ6400A
PRESSURE SENSOR
0.2 TO 4.8 V OUTPUT
MPXHZ6400AC6T1
PIN NUMBERS
V
GND
(3.0 TO 58 psi)
CASE 1317A-03
N/C
INTEGRATED
V
OUT
S
Rev 0, 08/2005
5
6
7
8
MPXHZ6400A
(1)
N/C
N/C
N/C
N/C

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mpxhz6400a Summary of contents

Page 1

... On-Chip Signal Conditioned, Temperature Compensated and Calibrated The Freescale MPXHZ6400A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on-chip integration make the Freescale pressure sensor a logical and economical choice for the system designer ...

Page 2

... Storage Temperature Operating Temperature Output Source Current @ Full Scale Output Output Sink Current @ Minimum Pressure Offset 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from V MPXHZ6400A Thin Film Gain Stage #2 ...

Page 3

... R — — Min Typ Max Unit 20 — 400 kPa 4.64 5.0 5.36 Vdc — 6.0 10 mAdc 0.133 0.2 0.267 Vdc 4.733 4.8 4.866 Vdc 4.467 4.6 4.733 Vdc ±1.5 — — %V — 12.1 — mV/kPa — 1.0 — ms — 20 — ms ±0.25 — — 25°C. FSS MPXHZ6400A FSS FSS 3 ...

Page 4

... MPXHZ6400A 4 transmitted to the silicon diaphragm. The MPXHZ6400A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application ...

Page 5

... Transfer Function (MPXHZ6400A) Normal Transfer Value: V OUT ± Pressure Error x Temp. Factor x 0.002421 5.0 ± 0. Temperature Error Band 4.0 3.0 Temperature 2.0 Error Factor 1.0 0.0 -40 NOTE: The Temperature Multiplier is a linear response from 0°C to -40°C and from 85°C to 125°C Pressure Error Band 6 ...

Page 6

... MPXHZ6400A 6 PACKAGE DIMENSIONS CASE 1317A-03 ISSUE C SUPER SMALL OUTLINE PACKAGE PAGE Sensors Freescale Semiconductor ...

Page 7

... Sensors Freescale Semiconductor PACKAGE DIMENSIONS CASE 1317A-03 ISSUE C SUPER SMALL OUTLINE PACKAGE PAGE MPXHZ6400A 7 ...

Page 8

... Freescale Semiconductor Literature Distribution Center P.O. Box 5405 Denver, Colorado 80217 1-800-441-2447 or 303-675-2140 Fax: 303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com MPXHZ6400A Rev. 0 08/2005 Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document ...

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