S8552 HAMAMATSU [Hamamatsu Corporation], S8552 Datasheet
S8552
Manufacturer Part Number
S8552
Description
Photodiodes for VUV (Vacuum UV) detection
Manufacturer
HAMAMATSU [Hamamatsu Corporation]
Datasheet
1.S8552.pdf
(2 pages)
Si photodiode
S8551, S8552, S8553
P H O T O D I O D E
S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide
optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with
conventional types.
I
I
S8551, S8552 and S8553 use windowless packages with no protection on the photodiode chip. Always use the following
precautions when handling these photodiodes.
I Handling precautions
G
G
G
G
G
l
l
l
Photodiodes for VUV (Vacuum UV) detection
Features
Reliable detection improves of ArF excimer laser
(λ=193 nm)
Large active area
S8551: 5.8 × 5.8 mm
S8552: 10 × 10 mm
S8553: 18 × 18 mm
Windowless package
S8551: TO-8 metal package
S8552: 16.5 × 15.0 mm ceramic package
S8553: 25.5 × 25.5 mm ceramic package
λ
Ω
°
°
l
l
Applications
ArF excimer laser detection
Detection of various UV light sources
°
°
1
Related parts for S8552
Image
Part Number
Description
Manufacturer
Datasheet
Request
R
Part Number:
Description:
Resin coating type (5R type)
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
LARGE PHOTOCATHODE AREA PHOTOMULTIPLIER TUBES
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
CdS photoconductive cell
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
For flame eye/using photo IC diode (RoHS compliance) instead of CdS cell
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Current-output type sensors with variable integration time function
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Low readout noise, high resolution (pixel size: 12 ..m)
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Si PIN photodiode Plastic SIP (Single In-line Package)
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Back-thinned TDI-CCD Operating the back-thinned CCD in TDI mode delivers high sensitivity.
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Photo IC for laser beam synchronous detection Low voltage operation (3.3 V)
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Si photodiode
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
CAPILLARY PLATE
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
NMOS linear image sensor
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
NMOS Linear image sensor
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
NMOS linear image sensor Current output, high UV sensitivity, excellent linearity, low power consumption
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
Part Number:
Description:
Si photodiode For UV to visible, precision photometry; suppressed IR sensitivity
Manufacturer:
HAMAMATSU [Hamamatsu Corporation]
Datasheet:
S8552 Summary of contents
Page 1
... Photodiodes for VUV (Vacuum UV) detection S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with conventional types ...
Page 2
... I Variation in sensitivity due to VUV exposure 2 /pulse, f=100 Hz, λ=193 nm, pulse width=15 ns (FWHM)] [Typ. ArF excimer laser, 0.1 mJ/cm 120 100 S8551, S8552, S8553 CONVENTIONAL TYPE 20 0 NUMBER OF SHOT S8552 16.5 ± 0.2 ACTIVE AREA 10 × 10 PHOTOSENSITIVE SURFACE 0.5 LEAD 15.1 ± 0.3 12.5 ± 0.2 ANODE TERMINAL MARK HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, http://www ...