TS83C51RD2 ATMEL [ATMEL Corporation], TS83C51RD2 Datasheet - Page 5

• Manufacturer Part Number: TS83C51RD2
• Description: Qualification Package TS87C51RD2 / TS83C51RD2 CMOS 0.5Um
• Manufacturer: ATMEL [ATMEL Corporation]

Qualpack TS87C51RD2/TS83C51RD2
3.2 Product Design
Die Size
Pad Size Opening
Logic Effective Channel Length
Gate Poly Width (min.)
Gate Poly Spacing (min.)
Metal 1 Width
Metal 1 Spacing
Metal 2 Width
Metal 2 Spacing
Metal 3 Width
Metal 3 Spacing
Contact size
Via 1 size
Via 2 size
June 2001
4260µm * 4300µm (17.47mm2)
80µm * 80µm
0.5 m
0.50 m
0.60 m
0.60 m
0.70 m
0.80 m
0.70 m
0.80 m
0.70 m
0.60µm
0.60µm
0.60µm
Atmel Wireless & Microcontrollers
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