AN2434 Freescale Semiconductor / Motorola, AN2434 Datasheet - Page 27

• Manufacturer Part Number: AN2434
• Description: Input/Output (I/O) Pin Drivers
• Manufacturer: Freescale Semiconductor / Motorola

Reliability and Quality Assurance
Page 6 of 6
6501 Wm. Cannon Drive West
Austin, Texas 78735-8598
Electrostatic Discharge (ESD) in Integrated Circuits - A Primer
(rev 2.0 - 5/5/95)
Figure 6 - SEM micrograph of poly melt filaments. The unit has been stripped back to reveal
polysilicon.
gate oxide rupture
poly melt trench
spiked contact
Figure 7 - SEM micrograph showing three ESD failure mechanisms resulting from a single ESD
stress. A spiked contact, poly melt trench and gate oxide short are all present.
This technical report was compiled by Mark Thomas and Carole LeClair of Motorola's CSIC
Failure Analysis Group. Please forward any questions or comments to them at the address
listed above.