AT89C51ED2-SMSIM ATMEL Corporation, AT89C51ED2-SMSIM Datasheet - Page 4

• Manufacturer Part Number: AT89C51ED2-SMSIM
• Description: 8-bit Flash Microcontroller
• Manufacturer: ATMEL Corporation

3 Technology Information
3.1 Wafer Process Technology
Process Type (Name):
Base Material:
Number Of Masks
Gate Oxide (Logic transistors)
Gate Oxide (EPROM cell)
Polysilicon
Metal
Passivation
4
Thickness
Wafer Thickness (final)
Wafer Diameter
Material
Thickness
Material
Thickness
Number of Layers
Thickness Poly 1
Thickness Poly 2
Number of Layers
Material:
Layer 1 Thickness
Layer 2 Thickness
Layer 3 Thickness
Material
21000A
Logic 0.35um with embedded FLASH (AT56800)
Epitaxied Silicon
475 um
150 mm
27
Silicon Dioxide
68A
Silicon Dioxide
390A
2
1400A Amorphous
3200A
3
Aluminum Copper
5000A
5000A
8000A
Oxide HDP/ Oxy-nitride
AT89C51RD2 / AT89C51ED2 QualPack
Rev. 0 – 2003 July